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Optimal Dopant Profiling in Semiconductor Devices
by
Martin Burger
WWU Muenster
Coauthors: Marie-Therese Wolfram, Rene Pinnau
In this talk we shall discuss some mathematical problems connected with the optimization of doping profiles in semiconductor devices, in stationary as well as in transient situations.
Date received: May 22, 2007
Copyright © 2007 by the author(s). The author(s) of this document and the organizers of the conference have granted their consent to include this abstract in Atlas Conferences Inc. Document # caum-44.