Atlas home || Conferences | Abstracts | about Atlas
Host: Institute for Mathematics and its Applications
Homepage: http://www.ima.umn.edu/reactive/spring/rf10.html
Email: staff@ima.umn.edu
Organizers: Leonard Borucki, Christian Ringhofer
Description:
Multilayered compound materials with microscopically structured surfaces play a key role in semiconductor manufacturing.
These structures are produced by a variety of processes, such as the deposition of thin films, etching techniques and controlled
crystal growth.
The topic of this workshop is the integration of different models describing these processes on different spatial and temporal scales. Well-developed models exist for each stage of the above processes on the microscopic-atomistic and macroscopic-fluid scale. However, in order to describe completely the whole process, it is necessary to link these models via an appropriate mathematical description of the transition regimes. This involves a mixture of boundary layer and homogenization techniques as well as a mathematical analysis of the transition process from the atomistic description of the early stages of thin film growth to the evolution of continuous films. Computational issues covered by this workshop will be the deterministic and probablilistic representation of film surfaces and numerical methods for the transitional models.
Date received: August 27, 1999
© 2008 Atlas Conferences Inc.